// definition
ESC
Electrostatic chuck
Short definition
A support that holds a wafer during some manufacturing operations using electrostatic force. A backside gas can improve heat transfer between the wafer and the chuck. Gas pressure, wafer bow and clamping uniformity affect how this interface performs.
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Knowledge map
Related analyses
Primary sources
- Parizi et al., Qorvo / CS MANTECH, May 2022Printed page 265: electrostatic clamping, backside gas and wafer bow.